5 Patents
- US121854502024Semiconductor Manufacturing Apparatus and Operating Method Thereof
Samsung Electronics Co., Ltd.
0 cites - US119799732024Semiconductor Manufacturing Apparatus and Operating Method Thereof
Samsung Electronics Co., Ltd.
0 cites - US119407262024Mask Protective Module, Pellicle Having the Same, and Lithography Apparatus Having the Same
INDUSTRY-UNIVERSITY COOPERATION FOUNDATION HANYANG UNIVERSITY
0 cites - US118289522023Light Source and Extreme Ultraviolet Light Source System Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites - US117787192023Laser Beam Delivery Apparatus for Extreme Ultra Violet Light Source
Samsung Electronics Co., Ltd.
0 cites