Patents/Inventors

Seongbo Shim

Suwon-siKR1 patent

2 Patents

US119602122024
Extreme Ultraviolet Lithography Device and Method of Operating Extreme Ultraviolet Lithography Device
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US117622772023
EUV Photomask
Samsung Electronics Co., Ltd.
0 cites