Patents/Inventors

Seok Heo

Goyang-siKR13 patents

11 Patents

US126079442026
Extreme Ultraviolet Source Cleaning Apparatus, EUV Source Cleaning Method Using the Same, and Substrate Processing Method Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US125648722026
Pocket Flange Forming Device for Duct
JINWOONG TECHNOLOGY CO., Ltd.
0 cites
US125687902026
Substrate Processing Apparatus and Method of Manufacturing Semiconductor Device Using the Same
Samsung Electronics Co., Ltd.
0 cites
US125470712026
Spin Coater
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US123728852025
Substrate Processing Apparatus and Method of Fabricating Semiconductor Device Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US122705942025
Refrigerator
LG ELECTRONICS Inc.
0 cites
US119278902024
Substrate Processing Apparatus and Method of Fabricating Semiconductor Device Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US119232092024
Substrate Processing Apparatus and Substrate Processing Method
Samsung Electronics Co., Ltd.
0 cites
US117336162023
System for Supplying Photoresist and Method for Fabricating Semiconductor Device Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US117264062023
Method of Coating a Photoresist and Apparatus for Performing the Same
Seoul National University R&DB Foundation
0 cites
US115904602023
Chemical Solution Evaporation Device and Substrate Processing Device Including the Same
Samsung Electronics Co., Ltd.
0 cites