Patents/Inventors

Seobong Chang

SuwonKR3 patents

4 Patents

US122371702025
Haloalkynyl Dicobalt Hexacarbonyl Precursors for Chemical Vapor Deposition of Cobalt
ENTEGRIS, Inc.
0 cites
US120716882024
Precursors and Methods for Preparing Silicon-containing Films
ENTEGRIS, Inc.
0 cites
US120376812024
Method for Forming Carbon Rich Silicon-containing Films
ENTEGRIS, Inc.
0 cites
US118043752023
Haloalkynyl Dicobalt Hexacarbonyl Precursors for Chemical Vapor Deposition of Cobalt
ENTEGRIS, Inc.
0 cites