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Inventors
Senthil Kumar Nattamai Subramanian
Hosur
IN
2 patents
3 Patents
US12486571
2025
Atomic Layer Deposition Coating System for Inner Walls of Gas Lines
APPLIED MATERIALS, Inc.
0 cites
US12404584
2025
Parallel Atomic Layer Deposition of Target Element Interiors
Applied Materials, Inc.
0 cites
US12074010
2024
Atomic Layer Deposition Part Coating Chamber
APPLIED MATERIALS, Inc.
0 cites