Patents/Inventors

Senthil Arasu Subas Chandra Bose

Chandler, AZUS4 patents

3 Patents

US125535232026
Thermal Break Between a Substrate Processing Chamber and Substrate Handling Chamber
ASM IP Holding B.V.
0 cites
US125506642026
Standard Base Components for Forming Inboard and Outboard Substrate Handling Chambers and Their Use in Production of Substrate Processing Systems with Expanded Production Capacity
ASM IP Holding B.V.
0 cites
USD11060822025
End Effector
ASM IP Holding B.V.
0 cites