Patents/Inventors

Sema Ermez

Santa Clara, CAUS3 patents

4 Patents

US123621882025
Method for Preventing Line Bending During Metal Fill Process
Lam Research Corporation
0 cites
US122372212025
Nucleation-free Tungsten Deposition
Lam Research Corporation
0 cites
US120778582024
Tungsten Deposition
Lam Research Corporation
0 cites
US120606392024
Rapid Flush Purging During Atomic Layer Deposition
Lam Research Corporation
0 cites