Patents/Inventors

Seiji Matsuyama

ToyamaJP3 patents

3 Patents

US123548712025
Ultrathin Atomic Layer Deposition Film Accuracy Thickness Control
Lam Research Corporation
0 cites
US116705032023
Method of Atomic Layer Deposition
Lam Research Corporation
0 cites
US116461982023
Ultrathin Atomic Layer Deposition Film Accuracy Thickness Control
Lam Research Corporation
0 cites