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Inventors
Seiichiro Kanno
Tokyo
JP
3 patents
4 Patents
US12211665
2025
Charged Particle Beam Device
Hitachi High-tech Corporation
0 cites
US12106930
2024
Charged Particle Beam Device
Hitachi High-tech Corporation
0 cites
US11929231
2024
Charged Particle Beam Device
Hitachi High-tech Corporation
0 cites
US11735394
2023
Charged Particle Beam Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites