Seiichi Kaise

4 Patents

• US124446322025

  System of Processing Substrate, Transfer Method, Transfer Program, and Holder

  TOKYO ELECTRON LIMITED

  0 cites
• US122857862025

  Substrate Processing Apparatus, Purge Gas Control Method, and Vacuum Transfer Chamber Cleaning Method

  TOKYO ELECTRON LIMITED

  0 cites
• US117354482023

  Container, Container Partition Plate, Substrate Processing System, and Substrate Transfer Method

  TOKYO ELECTRON LIMITED

  0 cites
• US116316072023

  Carrier and Jig

  TOKYO ELECTRON LIMITED

  0 cites