8 Patents
- US125661912026Aging Compensation of a Ferroelectric Piezoelectric Shock Sensor
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- US121487172024Through Wafer Trench Isolation Between Transistors in an Integrated Circuit
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0 cites - US118343312023MEMS Encapsulation Employing Lower Pressure and Higher Pressure Deposition Processes
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0 cites - US118155262023Aging Compensation of a Ferroelectric Piezoelectric Shock Sensor
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