Patents/Inventors

Scott Lefevre

Albany, NYUS11 patents

5 Patents

US126223362026
Bonding Layer and Process
Tokyo Electron Limited
0 cites
US125820172026
Bonding Layer and Process
Tokyo Electron Limited
0 cites
US124610342025
In-situ Fluorescence-based Chamber and Wafer Monitoring
Tokyo Electron Limited
0 cites
US123082502025
Pre-etch Treatment for Metal Etch
Tokyo Electron Limited
0 cites
US116262712023
Surface Fluorination Remediation for Aluminium Oxide Electrostatic Chucks
Tokyo Electron Limited
0 cites