Patents/Inventors

Schubert S. Chu

San Francisco, CAUS15 patents

15 Patents

US125936432026
Batch Thermal Process Chamber
Applied Materials, Inc.
0 cites
US124493092025
Methods for Detection Using Optical Emission Spectroscopy
Applied Materials, Inc.
0 cites
US124009042025
Thermal Processing Susceptor
Applied Materials, Inc.
0 cites
US121966172025
Temperature Profile Measurement and Synchronized Control on Substrate and Susceptor in an Epitaxy Chamber
Applied Materials, Inc.
0 cites
US121701962024
Methods and Systems for Cleaning High Aspect Ratio Structures
Applied Materials, Inc.
0 cites
US121632292024
Multi Zone Spot Heating in EPI
Applied Materials, Inc.
0 cites
US121659342024
Substrate Processing Monitoring
Applied Materials, Inc.
0 cites
US121256982024
Integrated Epitaxy and Preclean System
Applied Materials, Inc.
0 cites
US120377012024
Multi-thermal CVD Chambers with Shared Gas Delivery and Exhaust System
Applied Materials, Inc.
0 cites
US119963072024
Semiconductor Processing Tool Platform Configuration with Reduced Footprint
Applied Materials, Inc.
0 cites
US118482262023
Thermal Processing Susceptor
Applied Materials, Inc.
0 cites
US118210882023
Multi Zone Spot Heating in EPI
Applied Materials, Inc.
0 cites
US118154012023
Temperature Calibration with Band Gap Absorption Method
Applied Materials, Inc.
0 cites
US116495592023
Method of Utilizing a Degassing Chamber to Reduce Arsenic Outgassing Following Deposition of Arsenic-containing Material on a Substrate
Applied Materials, Inc.
0 cites
US116055442023
Methods and Systems for Cleaning High Aspect Ratio Structures
APPLIED MATERIALS, Inc.
0 cites