Patents/Inventors

Satoshi Shimmura

KumamotoJP2 patents

3 Patents

US122576112025
Cleaning Jig, Coating Apparatus, and Cleaning Method
TOKYO ELECTRON LIMITED
0 cites
US118680572024
Solution Treatment Apparatus and Cleaning Method
Tokyo Electron Limited
0 cites
US118624852024
Nozzle Standby Device, Liquid Processing Apparatus and Operation Method of Liquid Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites