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Inventors
Satoshi Ohuchida
Miyagi
JP
4 patents
4 Patents
US12568782
2026
Etching Method and Plasma Processing System
TOKYO ELECTRON LIMITED
0 cites
US12400835
2025
Plasma Processing Method and Plasma Processing System
Tokyo Electron Limited
0 cites
US12387941
2025
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US11798793
2023
Substrate Processing Method, Component Processing Method, and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites