Patents/Inventors

Satoshi Morita

KoshiJP3 patents

4 Patents

US123005242025
Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US118624892024
Substrate Processing Apparatus with Electronic Heater Powered by Power Feeding Coil
TOKYO ELECTRON LIMITED
0 cites
US116370352023
Substrate Processing Apparatus with Moving Device for Connecting and Disconnecting Heater Electrodes and Substrate Processing Method Thereof
TOKYO ELECTRON LIMITED
0 cites
US115519452023
Substrate Processing Apparatus Including Periphery Cover Body
TOKYO ELECTRON LIMITED
0 cites