Patents/Inventors

Satoshi Mitsugi

Kawasaki KanagawaJP3 patents

3 Patents

US125640202026
Pattern Forming Method, Semiconductor Device Manufacturing Method, and Pattern Forming Apparatus
Kioxia Corporation
0 cites
US120789222024
Template, Workpiece, and Alignment Method
Kioxia Corporation
0 cites
US118153482023
Template, Workpiece, and Alignment Method
Kioxia Corporation
0 cites