Patents/Inventors

Satoshi Iwatani

TochigiJP2 patents

3 Patents

US123862742025
Stage Device, Lithography Apparatus, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US120449622024
Forming Apparatus, Forming Method, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US115437452023
Stage Driving Apparatus, Lithography Apparatus, and Method of Manufacturing Article
CANON KABUSHIKI KAISHA
0 cites