Patents/Inventors

Satoru Yamaki

TokyoJP7 patents

8 Patents

US122305292025
Substrate Holding Apparatus, Substrate Suction Determination Method, Substrate Polishing Apparatus, Substrate Polishing Method, Method of Removing Liquid from Upper Surface of Wafer to Be Polished, Elastic Film for Pressing Wafer Against Polishing Pad, Substrate Release Method, and Constant Amount Gas Supply Apparatus
EBARA CORPORATION
0 cites
US121285232024
Polishing Apparatus
EBARA CORPORATION
0 cites
US120681892024
Elastic Membrane, Substrate Holding Device, and Polishing Apparatus
EBARA CORPORATION
0 cites
US119581632024
Substrate Holding Apparatus, Elastic Membrane, Polishing Apparatus, and Method for Replacing Elastic Membrane
EBARA CORPORATION
0 cites
USD10218322024
Elastic Membrane
EBARA CORPORATION
0 cites
US117453062023
Polishing Apparatus and Method of Controlling Inclination of Stationary Ring
EBARA CORPORATION
0 cites
US117312352023
Polishing Apparatus and Polishing Method
EBARA CORPORATION
0 cites
USD09890122023
Elastic Membrane
EBARA CORPORATION
0 cites