Satoru Jimbo

3 Patents

• US123395952025

  Measurement Apparatus, Lithography Apparatus, and Article Manufacturing Method

  CANON KABUSHIKI KAISHA

  0 cites
• US123076432025

  Processing Apparatus, Measurement Apparatus, Lithography Apparatus, Method of Manufacturing Article, Model, Processing Method, Measurement Method, Generation Method, and Generation Apparatus

  CANON KABUSHIKI KAISHA

  0 cites
• US121481812024

  Measurement Apparatus That Measures Position Information of Measurement Target in Predetermined Direction

  CANON KABUSHIKI KAISHA

  0 cites