Patents/Inventors

Satish Srinivasan

Fremont, CAUS2 patents

3 Patents

US122494902025
Single Crystal Metal Oxide Plasma Chamber Component
Lam Research Corporation
0 cites
US121989022025
Laminated Aerosol Deposition Coating for Aluminum Components for Plasma Processing Chambers
Lam Research Corporation
0 cites
US121295692024
Method for Conditioning Semiconductor Processing Chamber Components
Lam Research Corporation
0 cites