Sathya Swaroop Ganta

6 Patents

• US126069072026

  Method and Apparatus with High Conductance Components for Chamber Cleaning

  APPLIED MATERIALS, Inc.

  0 cites
• US124602982025

  Showerhead Design to Control Stray Deposition

  Applied Materials, Inc.

  0 cites
• US120338352024

  Modular Microwave Source with Multiple Metal Housings

  Applied Materials, Inc.

  0 cites
• US120209652024

  Magnetic Holding Structures for Plasma Processing Applications

  APPLIED MATERIALS, Inc.

  0 cites
• US119843022024

  Magnetic-material Shield Around Plasma Chambers Near Pedestal

  Applied Materials, Inc.

  0 cites
• US119591742024

  Shunt Door for Magnets in Plasma Process Chamber

  Applied Materials, Inc.

  0 cites