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Inventors
Sarpangala Hariharakeshava Hegde
Fremont, CA
US
6 patents
5 Patents
US12368117
2025
Electrostatic Discharge Prevention in Ion Beam System
PLASMA-THERM NES LLC
0 cites
US12176178
2024
Scanning Ion Beam Deposition and Etch
PLASMA-THERM NES LLC
0 cites
US11901167
2024
Ion Beam Deposition Target Life Enhancement
PLASMA-THERM NES LLC
0 cites
US11784025
2023
Integral Sweep in Ion Beam System
PLASMA-THERM NES LLC
0 cites
US11646171
2023
Scanning Ion Beam Etch
PLASMA-THERM NES LLC
0 cites