Patents/Inventors

Saravanapriyan Sriraman

Fremont, CAUS6 patents

6 Patents

US125300212026
Performance Predictors for Semiconductor-manufacturing Processes
Lam Research Corporation
0 cites
US120681522024
Semiconductor Substrate Bevel Cleaning
Lam Research Corporation
0 cites
US118878192024
Systems for Cooling RF Heated Chamber Components
Lam Research Corporation
0 cites
US117044632023
Method of Etch Model Calibration Using Optical Scatterometry
Lam Research Corporation
0 cites
US116927322023
Air Cooled Faraday Shield and Methods for Using the Same
Lam Research Corporation
0 cites
US116249812023
Resist and Etch Modeling
Lam Research Corporation
0 cites