Patents/Inventors

Sarath Babu

SingaporeRS5 patents

6 Patents

US124760862025
Spray-coated Electrostatic Chuck Design
Applied Materials, Inc.
0 cites
US121486292024
Shutter Disk
Applied Materials, Inc.
0 cites
US121005772024
High Conductance Inner Shield for Process Chamber
APPLIED MATERIALS, Inc.
0 cites
US120805222024
Preclean Chamber Upper Shield with Showerhead
APPLIED MATERIALS, Inc.
0 cites
US118813852024
Methods and Apparatus for Reducing Defects in Preclean Chambers
APPLIED MATERIALS, Inc.
0 cites
US118624802024
Shutter Disk
Applied Materials, Inc.
0 cites