18 Patents
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- US122117282025Electrostatic Chuck Design with Improved Chucking and Arcing Performance
Applied Materials, Inc.
0 cites - US121319132024Methods, Systems, and Apparatus for Processing Substrates Using One or More Amorphous Carbon Hardmask Layers
Applied Materials, Inc.
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- US118307062023Heated Pedestal Design for Improved Heat Transfer and Temperature Uniformity
Applied Materials, Inc.
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- US116949022023Methods, Systems, and Apparatus for Processing Substrates Using One or More Amorphous Carbon Hardmask Layers
Applied Materials, Inc.
0 cites - US116825742023Electrostatic Chuck Design with Improved Chucking and Arcing Performance
Applied Materials, Inc.
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