Patents/Inventors

Sanjeev Baluja

Campbell, CAUS42 patents

40 Patents

US125801592026
Plasma Showerhead Assembly and Method of Reducing Defects
Applied Materials, Inc.
0 cites
US125403982026
Showerhead Pumping Geometry for Precursor Containment
Applied Materials, Inc.
0 cites
US125422562026
Batch Processing Chambers for Plasma-enhanced Deposition
Applied Materials, Inc.
0 cites
USD11039482025
Gas Distribution Plate
Applied Materials, Inc.
0 cites
USD11040862025
Gas Distribution Plate
Applied Materials, Inc.
0 cites
US124697392025
Methods of Operating a Spatial Deposition Tool
Applied Materials, Inc.
0 cites
US124420802025
Plasma Showerhead Assembly and Method of Reducing Defects
Applied Materials, Inc.
0 cites
US123988082025
High Conductance Variable Orifice Valve
Applied Materials, Inc.
0 cites
USD10850292025
Gas Distribution Plate
Applied Materials, Inc.
0 cites
USD10808122025
Gas Mixer
Applied Materials, Inc.
0 cites
US123052832025
Dithering or Dynamic Offsets for Improved Uniformity
Applied Materials, Inc.
0 cites
US123052842025
Apparatus and Methods for Fine Planar Non-uniformity Improvement
Applied Materials, Inc.
0 cites
USD10711032025
Gas Distribution Plate
Applied Materials, Inc.
0 cites
US122763442025
Self-adjustable Variable Orifice Check Valve for Back Pressure Reduction
Applied Materials, Inc.
0 cites
US122241952025
Centering Wafer for Processing Chamber
Applied Materials, Inc.
0 cites
US121836182024
Apparatus and Methods to Transfer Substrates Into and Out of a Spatial Multi-substrate Processing Tool
Applied Materials, Inc.
0 cites
US120875552024
Method and System for Cleaning a Process Chamber
Applied Materials, Inc.
0 cites
US120778612024
Dithering or Dynamic Offsets for Improved Uniformity
Applied Materials, Inc.
0 cites
US120606382024
Deposition Apparatus and Methods Using Staggered Pumping Locations
Applied Materials, Inc.
0 cites
USD10377782024
Gas Distribution Plate
Applied Materials, Inc.
0 cites
US120573332024
Metrology Slot Plates
Applied Materials, Inc.
0 cites
US120183762024
Apparatus and Methods for Motor Shaft and Heater Leveling
Applied Materials, Inc.
0 cites
US120209572024
Heater Assembly with Process Gap Control for Batch Processing Chambers
Applied Materials, Inc.
0 cites
US119503842024
Dynamic Electrical and Fluid Delivery System with Indexing Motion for Batch Processing Chambers
APPLIED MATERIALS, Inc.
0 cites
US119231722024
Paired Dynamic Parallel Plate Capacitively Coupled Plasmas
APPLIED MATERIALS, Inc.
0 cites
US118942572024
Single Wafer Processing Environments with Spatial Separation
Applied Materials, Inc.
0 cites
US118188102023
Heater Assembly with Purge Gap Control and Temperature Uniformity for Batch Processing Chambers
APPLIED MATERIALS, Inc.
0 cites
US117911362023
Deposition Radial and Edge Profile Tunability Through Independent Control of TEOS Flow
Applied Materials, Inc.
0 cites
US117911902023
Apparatus and Methods for Real-time Wafer Chucking Detection
APPLIED MATERIALS, Inc.
0 cites
US117696842023
Wafer Heater with Backside and Integrated Bevel Purge
Applied Materials, Inc.
0 cites
US117464172023
Clean Isolation Valve for Reduced Dead Volume
Applied Materials, Inc.
0 cites
US117135082023
Apparatus and Methods for Improving Chemical Utilization Rate in Deposition Process
Applied Materials, Inc.
0 cites
US116825762023
Pedestal Heater for Spatial Multi-wafer Processing Tool
Applied Materials, Inc.
0 cites
US116232532023
In-situ DC Plasma for Cleaning Pedestal Heater
APPLIED MATERIALS, Inc.
0 cites
US115990692023
Method for Auto-tuning and Process Performance Assessment of Chamber Control
Applied Materials, Inc.
0 cites
US116020642023
Dynamic Electrical and Fluid Delivery System with Indexing Motion for Batch Processing Chambers
APPLIED MATERIALS, Inc.
0 cites
US115838162023
Gas Distribution Plate for Thermal Deposition
APPLIED MATERIALS, Inc.
0 cites
US115849932023
Thermally Uniform Deposition Station
APPLIED MATERIALS, Inc.
0 cites
US115867892023
Machine Learning Based Smart Process Recipe Builder to Improve Azimuthal Flow and Thickness Uniformity
APPLIED MATERIALS, Inc.
0 cites
US115491832023
Showerhead with Inlet Mixer
Applied Materials, Inc.
0 cites