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Inventors
Sanjay Kamath
Fremont, CA
US
2 patents
4 Patents
US12451345
2025
PECVD of Sibn Thin Films with Low Leakage Current
Applied Materials, Inc.
0 cites
US12040210
2024
Multi-pressure Bipolar Electrostatic Chucking
Applied Materials, Inc.
0 cites
US11817313
2023
Methods for Pressure Ramped Plasma Purge
Applied Materials, Inc.
0 cites
US11817320
2023
CVD Based Oxide-metal Multi Structure for 3D NAND Memory Devices
Applied Materials, Inc.
0 cites