4 Patents
- US123621492025Film Stress Control for Plasma Enhanced Chemical Vapor Deposition
Applied Materials, Inc.
0 cites - US119675162024Substrate Support for Chucking of Mask for Deposition Processes
Applied Materials, Inc.
0 cites - US118547712023Film Stress Control for Plasma Enhanced Chemical Vapor Deposition
APPLIED MATERIALS, Inc.
0 cites - 0 cites