Patents/Inventors

Sangjine Park

Suwon-siKR15 patents

14 Patents

US126107762026
Substrate Processing Apparatus, Substrate Processing Method, and Method of Manufacturing Semiconductor Device
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US125786472026
Substrate Rotating Apparatus, Substrate Processing System Including the Same, and Substrate Processing Method Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US124630612025
Wafer Drying Apparatus, Wafer Processing System Including the Same, and Wafer Processing Method Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US124203162025
Substrate Processing Apparatus and Substrate Processing Method
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US124227542025
Substrate Processing Apparatus, Semiconductor Manufacturing Equipment, and Substrate Processing Method
Samsung Electronics Co., Ltd.
0 cites
US123082552025
Apparatus and Method for Drying Substrate
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US122871472025
Wafer Processing Equipment and Method of Manufacturing Semiconductor Device
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US122781332025
Substrate Transferring Unit, Substrate Processing Apparatus, and Substrate Processing Method
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US122164082025
Apparatus for Drying Wafer and Method for Drying Wafer
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US122117162025
Substrate Processing Apparatus and Substrate Processing Method
Samsung Electronics Co., Ltd.
0 cites
US120573232024
Substrate Processing Method, Micropattern Forming Method, and Substrate Processing Apparatus
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US119357722024
Apparatus for Processing a Substrate
Samsung Electronics Co., Ltd.
0 cites
US118814262024
Substrate Transferring Unit, Substrate Processing Apparatus, and Substrate Processing Method
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US116401152023
Substrate Processing Apparatus, Semiconductor Manufacturing Equipment, and Substrate Processing Method
Samsung Electronics Co., Ltd.
0 cites