Patents/Inventors

Sang Ki Nam

Seongnam-siKR6 patents

7 Patents

US124943522025
Plasma Confinement Ring, Semiconductor Manufacturing Apparatus Including the Same, and Method of Manufacturing a Semiconductor Device Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US122725352025
Spectroscopic Analysis Method, Method for Fabricating Semiconductor Device Using the Same, and Substrate Process System Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US122610212025
Apparatus and Method for Treating Substrate
Samsung Electronics Co., Ltd.
0 cites
US117987882023
Hollow Cathode, an Apparatus Including a Hollow Cathode for Manufacturing a Semiconductor Device, and a Method of Manufacturing a Semiconductor Device Using a Hollow Cathode
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US116642422023
Cleaning Solution Production Systems and Methods, and Plasma Reaction Tanks
Samsung Electronics Co., Ltd.
0 cites
US115944002023
Multi Zone Gas Injection Upper Electrode System
Lam Research Corporation
0 cites
US115453722023
Plasma Generator, Cleaning Liquid Processing Apparatus, Semiconductor Device Cleaning Apparatus, Cleaning Liquid Processing Method, and Method of Manufacturing Semiconductor Device
SAMSUNG ELECTRONICS CO., Ltd.
0 cites