Patents/Inventors

Sang Hyun Son

BusanKR11 patents

11 Patents

US125604302026
Level Sensor Module and Portable Level Measuring Apparatus
Semes Co., Ltd.
0 cites
US124726212025
Teaching Method, Program Stored in the Medium for Executing the Teaching Method and Transfer System
SEMES CO., Ltd.
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US123174192025
Apparatus for Temperature Measurement and Method of Processing Substrate
SEMES CO., Ltd.
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US122402592025
Substrate Processing Device and Control Method for Substrate Processing Device
SEMES CO., Ltd.
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US122356632025
Apparatus for Controlling Flow Rate and Method of Controlling Flow Rate
SEMES CO., Ltd.
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US122241892025
Substrate Type Sensor and Method of Measuring the Impact Point and the Impact Force of Chemical
SEMES CO., Ltd.
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US120610972024
Substrate Type Sensor for Measuring Horizontality of Substrate Support Member Provided in Atmosphere Accompanied by Temperature Change, Method for Measuring Horizontality of Substrate Support Member by Using the Same, and Non-transitory Computer Readable Medium
SEMES CO., Ltd.
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US119338082024
Buffer Unit and Method for Storaging Substrate Type Sensor for Measuring of Horizontality of a Substrate Support Member Provided on a Temperature Varying Atmosphere
SEMES CO., Ltd.
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US119193032024
Jetting Driver and Substrate Treatment Apparatus and Method
SEMES CO., Ltd.
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US117568152023
Apparatus for and Method of Monitoring Warpage of Substrate, Substrate Treatment Apparatus, and Substrate-type Sensor
SEMES CO., Ltd.
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US117035202023
Wafer Type Sensor Unit and Data Acquisition Method Using the Wafer Type Sensor Unit
SEMES CO., Ltd.
0 cites