Patents/Inventors

Sang Hwi Ham

Gunpo-siKR5 patents

6 Patents

US124446412025
Travel Robot for Moving Substrate Transfer Robot in Vacuum Chamber
T-robotics Co., Ltd.
0 cites
US124349212025
Travel Robot for Moving Substrate Transfer Robot in Vacuum Chamber
T-robotics Co., Ltd.
0 cites
US122550902025
Apparatus for Transferring Substrate in Vacuum Chamber
T-robotics Co., Ltd.
0 cites
US122341062025
Apparatus for Transferring Substrate in Vaccum Chamber
T-ROBOTICS CO., Ltd.
0 cites
US120805862024
Substrate Transfer Robot for Transferring Substrate in Vacuum Chamber
T-robotics Co., Ltd.
0 cites
US118200052023
Substrate Transfer Robot for Transferring Substrate in Vacuum Chamber
T-robotics Co., Ltd.
0 cites