Patents/Inventors

Sandro Hoffmann

GiengenDE1 patent

2 Patents

US124067772025
Optical Element for a EUV Projection Exposure System
CARL ZEISS SMT GmbH
0 cites
US123862632025
Reflective Optical Element, Illumination Optical Unit, Projection Exposure Apparatus, and Method for Producing a Protective Layer
CARL ZEISS SMT GmbH
0 cites