Patents/Inventors

Samantha S.H. Tan

Newark, CAUS11 patents

3 Patents

US126019762026
All-in-one Dry Development for Metal-containing Photoresist
Lam Research Corporation
0 cites
US125046922025
Cyclic Development of Metal Oxide Based Photoresist for Etch Stop Deterrence
Lam Research Corporation
0 cites
US123157272025
Eliminating Yield Impact of Stochastics in Lithography
Lam Research Corporation
0 cites