Patents/Inventors

Samantha S. H. Tan

Newark, CAUS12 patents

15 Patents

US124746382025
Underlayer for Photoresist Adhesion and Dose Reduction
Lam Research Corporation
0 cites
US124746402025
Integration of Dry Development and Etch Processes for EUV Patterning in a Single Process Chamber
Lam Research Corporation
0 cites
US124354122025
High Density, Modulus, and Hardness Amorphous Carbon Films at Low Pressure
Lam Research Corporation
0 cites
US124379952025
Tin Oxide Films in Semiconductor Device Manufacturing
Lam Research Corporation
0 cites
US124179162025
Tin Oxide Films in Semiconductor Device Manufacturing
Lam Research Corporation
0 cites
US122939192025
Alternating Etch and Passivation Process
Lam Research Corporation
0 cites
US122781252025
Integrated Dry Processes for Patterning Radiation Photoresist Patterning
Lam Research Corporation
0 cites
US121835892024
Tin Oxide Mandrels in Patterning
Lam Research Corporation
0 cites
US121836042024
Integrated Dry Processes for Patterning Radiation Photoresist Patterning
Lam Research Corporation
0 cites
US121319092024
Selective Processing with Etch Residue-based Inhibitors
Lam Research Corporation
0 cites
US120947112024
Tin Oxide Films in Semiconductor Device Manufacturing
Lam Research Corporation
0 cites
US120625382024
Atomic Layer Etch and Selective Deposition Process for Extreme Ultraviolet Lithography Resist Improvement
Lam Research Corporation
0 cites
US119889652024
Underlayer for Photoresist Adhesion and Dose Reduction
Lam Research Corporation
0 cites
US118482122023
Alternating Etch and Passivation Process
Lam Research Corporation
0 cites
US115519382023
Alternating Etch and Passivation Process
Lam Research Corporation
0 cites