Patents/Inventors

Sagar Deepak Khivsara

HsinchuTW7 patents

6 Patents

US123728862025
Acoustic Particle Deflection in Lithography Tool
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121745452024
System and Method for Performing Extreme Ultraviolet Photolithography Processes
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120965442024
Lithography Thermal Control
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US118222592023
Acoustic Particle Deflection in Lithography Tool
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US117684372023
System and Method for Performing Extreme Ultraviolet Photolithography Processes
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US116475782023
Lithography Thermal Control
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites