Patents/Inventors

Sadao Hisakado

ToyamaJP2 patents

2 Patents

US125403882026
Method of Cleaning Member in Process Container, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Kokusai Electric Corporation
0 cites
US120538052024
Method of Cleaning Member in Process Container, Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
KOKUSAI ELECTRIC CORPORATION
0 cites