Patents/Inventors

Ryu Nakano

SagamiharaJP7 patents

7 Patents

US125903642026
Cyclical Deposition Methods
ASM IP Holding B.V.
0 cites
US124420822025
Reactor System Comprising a Tuning Circuit
ASM IP Holding B.V.
0 cites
US123946262025
Method of Forming a Structure and System for Same
ASM IP Holding B.V.
0 cites
US120740222024
Method and System for Forming Patterned Structures Using Multiple Patterning Process
ASM IP Holding B.V.
0 cites
US120338492024
Method for Depositing Silicon Oxide Film Having Improved Quality by PEALD Using Bis(diethylamino)silane
ASM IP Holding B.V.
0 cites
US119707692024
Cyclical Deposition Methods
ASM IP Holding B.V.
0 cites
US118307382023
Method for Forming Barrier Layer and Method for Manufacturing Semiconductor Device
ASM IP Holding B.V.
0 cites