Patents/Inventors

Ryu Nagai

MiyagiJP6 patents

5 Patents

US125801542026
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US125639872026
Plasma Processing Method and Plasma Processing System
TOKYO ELECTRON LIMITED
0 cites
US124943542025
Substrate Processing System, Information Processing Apparatus, and Information Processing Method for Dynamic Control of Substrate Plasma Processing
TOKYO ELECTRON LIMITED
0 cites
US123476512025
Etching Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US120726932024
Analysis Device and Analysis Method
TOKYO ELECTRON LIMITED
0 cites