Ryoh Kawana

3 Patents

• US125371632026

  Multi-charged Particle Beam Writing Apparatus, and Multi-charged Particle Beam Writing Method

  Nuflare Technology, Inc.

  0 cites
• US124127302025

  Multi-charged Particle Beam Writing Apparatus and Multi-charged Particle Beam Writing Method

  Nuflare Technology, Inc.

  0 cites
• US115560612023

  Multiple Charged Particle Beam Writing Apparatus and Multiple Charged Particle Beam Writing Method

  Nuflare Technology, Inc.

  0 cites