11 Patents
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- US120344232024XBAR Frontside Etch Process Using Polysilicon Sacrificial Layer
MURATA MANUFACTURING CO., Ltd
0 cites - US119679432024Transversely-excited Film Bulk Acoustic Resonator with Etched Conductor Patterns
MURATA MANUFACTURING CO., Ltd.
0 cites - US119093742024Transversely-excited Film Bulk Acoustic Resonators with Interdigital Transducer Configured to Reduce Diaphragm Stress
MURATA MANUFACTURING CO., Ltd.
0 cites - US118884602024Transversely-excited Film Bulk Acoustic Resonators with Piezoelectric Diaphragm Supported by Piezoelectric Substrate
MURATA MANUFACTURING CO., Ltd.
0 cites - US118178452023Method for Making Transversely-excited Film Bulk Acoustic Resonators with Piezoelectric Diaphragm Supported by Piezoelectric Substrate
MURATA MANUFACTURING CO., Ltd.
0 cites - US118113912023Transversely-excited Film Bulk Acoustic Resonator with Etched Conductor Patterns
MURATA MANUFACTURING CO., Ltd.
0 cites - US116320962023Transversely-excited Film Bulk Acoustic Resonator Comprising Small Cells
MURATA MANUFACTURING CO., Ltd.
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