Patents/Inventors

Ryo Ohkubo

TokyoJP3 patents

4 Patents

US121533382024
Mask Blank, Method for Manufacturing Transfer Mask, and Method for Manufacturing Semiconductor Device
HOYA CORPORATION
0 cites
US120076842024
Mask Blank, Method of Manufacturing Imprint Mold, Method of Manufacturing Transfer Mask, Method of Manufacturing Reflective Mask, and Method of Manufacturing Semiconductor Device
HOYA CORPORATION
0 cites
US117622792023
Mask Blank, Method for Manufacturing Reflective Mask, and Method for Manufacturing Semiconductor Device
HOYA CORPORATION
0 cites
US116303882023
Mask Blank, Method for Manufacturing Phase Shift Mask, and Method for Manufacturing Semiconductor Device
HOYA CORPORATION
0 cites