5 Patents
- US122464822025Control Apparatus, Imprint Apparatus, and Method of Manufacturing Article
CANON KABUSHIKI KAISHA
0 cites - US121471642024Motion Control Apparatus, Lithography Apparatus, Planarization Apparatus, Processing Apparatus, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites - US118158612023Feedback Control Device That Suppresses Disturbance Vibration Using Machine Learning, Article Manufacturing Method, and Feedback Control Method
CANON KABUSHIKI KAISHA
0 cites - US117143522023Imprinting Apparatus, Imprinting Method, Method for Producing Article, Substrate, and Mold
CANON KABUSHIKI KAISHA
0 cites - US115840632023Imprint Method, Imprint Apparatus, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites