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Inventors
Ryo Miyama
Hachioji
JP
2 patents
2 Patents
US12506000
2025
Method of Filling Gap with Flowable Carbon Layer
ASM IP Holding B.V.
0 cites
US11705333
2023
Structures Including Multiple Carbon Layers and Methods of Forming and Using Same
ASM IP Holding B.V.
0 cites