Patents/Inventors

Ryo Mitsui

JoetsuJP1 patent

2 Patents

US123325652025
Thermosetting Iodine- and Silicon-containing Material, Composition Containing the Material for Forming Resist Underlayer Film for EUV Lithography, and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites
US119142952024
Thermosetting Iodine- and Silicon-containing Material, Composition Containing the Material for Forming Resist Underlayer Film for EUV Lithography, and Patterning Process
SHIN-ETSU CHEMICAL CO., Ltd.
0 cites