Patents/Inventors

Ryo Matsubara

OsakaJP10 patents

5 Patents

US126222342026
Selective In-situ Carbon-based Mask Protection
Tokyo Electron Limited
0 cites
US123062352025
Electromagnetic Wave Visualization Device
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., Ltd.
0 cites
US120091822024
Temperature Control Method and Temperature Control Device
TOKYO ELECTRON LIMITED
0 cites
US119535362024
Electromagnetic Wave Visualization Device
PANASONIC INTELLECTUAL PROPERTY MANAGEMENT CO., Ltd.
0 cites
US117053092023
Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites