Patents/Inventors

Russell Westerman

Land O' Lakes, FLUS5 patents

6 Patents

US124890182025
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer
PLASMA-THERM LLC
0 cites
US123681172025
Electrostatic Discharge Prevention in Ion Beam System
PLASMA-THERM NES LLC
0 cites
US119087412024
Protective Coating for Plasma Dicing
Plasma-therm LLC
0 cites
US117474942023
Ion Filter Using Aperture Plate with Plurality of Zones
Plasma-therm LLC
0 cites
US116519992023
Method and Apparatus for Plasma Dicing a Semi-conductor Wafer
Plasma-therm LLC
0 cites
US115878342023
Protective Coating for Plasma Dicing
Plasma-therm LLC
0 cites