Patents/Inventors

Russell Allen Burdt

San Diego, CAUS3 patents

4 Patents

US123604662025
Maintenance of Modules for Light Sources Used in Semiconductor Photolithography
Cymer, LLC
0 cites
US121693632024
Radiation Source Testing
Cymer, LLC
0 cites
US120076962024
Burst Statistics Data Aggregation Filter
Cymer, LLC
0 cites
US118600362024
Determination of Measurement Error in an Etalon
Cymer, LLC
0 cites