Patents/Inventors

Rui-fang Shi

Cupertino, CAUS6 patents

6 Patents

US125299542026
In-situ In-band and Out-of-band Spectral Measurement for EUV Tools
KLA Corporation
0 cites
US123600582025
Integration of an Optical Height Sensor in Mask Inspection Tools
KLA Corporation
0 cites
US121333182024
Rotating Target for Extreme Ultraviolet Source with Liquid Metal
KLA Corporation
0 cites
US120928142024
Correcting Aberration and Apodization of an Optical System Using Correction Plates
KLA Corporation
0 cites
US120941012024
Inspection of Reticles Using Machine Learning
KLA-TENCOR CORPORATION
0 cites
US117336052023
EUV In-situ Linearity Calibration for TDI Image Sensors Using Test Photomasks
KLA Corporation
0 cites